| 000 | 02387nam a2200421 i 4500 | ||
|---|---|---|---|
| 001 | ebr10817952 | ||
| 003 | CaPaEBR | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 110726t20112011sz ad ob 101 0 eng|d | ||
| 020 | _z9783037851456 (pbk.) | ||
| 020 | _z3037851457 (pbk.) | ||
| 020 | _a9783038136095 (e-book) | ||
| 040 |
_aCaPaEBR _beng _erda _epn _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7875 _b.I538 2011eb |
| 082 | 0 | 4 |
_a233 _223 |
| 111 | 2 |
_aInternational Conference on Materials for Advanced Technologies _d(2011 : _cSingapore), _jissuing body. |
|
| 245 | 1 | 0 |
_aNEMS/MEMS technology and devices : _bselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / _cedited by Lynn Khine and Julius M. Tsai. |
| 264 | 1 |
_aDurnten-Zurich, Switzerland : _bTrans Tech Publications, _c[2011] |
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| 264 | 4 | _c�2011 | |
| 300 |
_a1 online resource (233 pages) : _billustrations (some color). |
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| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 490 | 1 |
_aAdvanced materials research, _x1022-6680 ; _vvolume 254 |
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| 504 | _aIncludes bibliographical references and indexes. | ||
| 588 | _aDescription based on print version record. | ||
| 590 | _aElectronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 |
_aNanoelectromechanical systems _vCongresses. |
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| 650 | 0 |
_aMicroelectromechanical systems _vCongresses. |
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| 655 | 0 | _aElectronic books. | |
| 700 | 1 | _aKhine, Lynn. | |
| 700 | 1 | _aTsai, Julius M. | |
| 776 | 0 | 8 |
_iPrint version: _aInternational Conference on Materials for Advanced Technologies. _tNEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore. _dDurnten-Zurich, Switzerland : Trans Tech Publications, [2011] _h228 pages ; 25 cm. _kAdvanced materials research ; volume 254 _x1022-6680 ; _z9783037851456 _w(OCoLC)ocn751790683 _w(DLC)10817952 |
| 797 | 2 | _aebrary. | |
| 830 | 0 |
_aAdvanced materials research ; _vv. 254. |
|
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10817952 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c77963 _d77963 |
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