000			01838nam a2200361 a 4500
001			ebr10604223
003			CaPaEBR
006			m u
007			cr cn|||||||||
008			121005s2012 sz a sb 101 0 eng d
020			_z9783037852859
020			_z9783038136828 (e-book)
040			_aCaPaEBR _cCaPaEBR
035			_a(OCoLC)815478952
050	1	4	_aTK7871.15.S55 _bH36 2010eb
111	2		_aInternational Symposium on Silicon Science _n(6th : _d2010 : _cKiry�u-shi, Japan)
245	1	0	_aSilicon science and advanced micro-device engineering II _h[electronic resource] : _bselected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / _cedited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
260			_aDurnten-Zurich : _bTrans Tech Publications, _c2012.
300			_a311 p. : _bill. (some col.).
440		0	_aKey engineering materials, _x1662-9809 ; _vv. 497
504			_aIncludes bibliographical references and indexes.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2011. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aSilicon _vCongresses.
650		0	_aNanostructures _vCongresses.
650		0	_aMicroelectronics _vCongresses.
655		7	_aElectronic books. _2local
700	1		_aHanaizumi, Osamu.
700	1		_aUnno, Masafumi.
700	1		_aMiura, Kenta.
710	2		_aebrary, Inc.
711	2		_aInternational Conference on Advanced Micro-Device Engineering _n(2nd : _d2010 : _cKiry�u-shi, Japan)
856	4	0	_uhttp://site.ebrary.com/lib/rucke/Doc?id=10604223 _zAn electronic book accessible through the World Wide Web; click to view
999			_c99882 _d99882