Plasma processing of materials
Plasma processing of materials scientific opportunities and technological challenges / [electronic resource] :
Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
- Washington, D.C. : National Academy Press, 1991.
- xii, 75 p. : ill.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Plasma engineering.
Microelectronics--Materials--Effect of radiation on.
Surfaces (Technology)
Electronic books.
TA2005 / .N37 1991eb
621.044
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Plasma engineering.
Microelectronics--Materials--Effect of radiation on.
Surfaces (Technology)
Electronic books.
TA2005 / .N37 1991eb
621.044