Plasma processing of materials (Record no. 178574)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01426nam a2200301 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.044 |
| 245 10 - TITLE STATEMENT | |
| Title | Plasma processing of materials |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Washington, D.C. : |
| Name of publisher | National Academy Press, |
| Year of publication | 1991. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xii, 75 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Plasma engineering. |
| Topical Term | Microelectronics |
| Topical Term | Surfaces (Technology) |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10055392 |
No items available.