Plasma processing and processing science
Plasma processing and processing science [electronic resource] /
Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
- Washington, D.C. : National Academy Press, 1995.
- x, 35 p.
- NRL strategic series .
- NRL strategic series. .
Committee chair: Francis F. Chen. This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Plasma engineering.
Semiconductors--Etching.
Plasma etching.
Electronic books.
TA2020 / .P5 1995eb
621.044
Committee chair: Francis F. Chen. This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Plasma engineering.
Semiconductors--Etching.
Plasma etching.
Electronic books.
TA2020 / .P5 1995eb
621.044