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Microsystem design

Senturia, Stephen D., 1940-

Microsystem design [electronic resource] / Stephen D. Senturia. - Boston : Kluwer Academic, 2002. - xxvi, 716 p. : ill.

Includes bibliographical references (p. [665]-676) and index.

Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.

ISBN:

LCCN:

Nat. Bib. No.: GBA1-04525

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7875 / .S46 2002eb

Dewey Class. No.: 621.381

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