Microsystem design [electronic resource] / Stephen D. Senturia.

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TextPublication details: Boston : Kluwer Academic, 2002.Description: xxvi, 716 p. : illSubject(s):

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Includes bibliographical references (p. [665]-676) and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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