Semiconductor strain metrology
Wong, Terence K. S.
Semiconductor strain metrology principles and applications / [electronic resource] : Terence K.S. Wong. - [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012] - 136 p. : ill.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Semiconductors--Design and construction--Materials.
Compound semiconductors--Design and construction--Materials.
Silicon-on-insulator technology.
Electronic books.
TK7871.85 / .W65 2012eb
Semiconductor strain metrology principles and applications / [electronic resource] : Terence K.S. Wong. - [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012] - 136 p. : ill.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Semiconductors--Design and construction--Materials.
Compound semiconductors--Design and construction--Materials.
Silicon-on-insulator technology.
Electronic books.
TK7871.85 / .W65 2012eb