Semiconductor strain metrology (Record no. 80757)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01252nam a2200289Ia 4500 |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Wong, Terence K. S. |
| 245 10 - TITLE STATEMENT | |
| Title | Semiconductor strain metrology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | [Saif Zone, Sharjah, U.A.E] ; |
| -- | Oak Park, IL : |
| Name of publisher | Bentham Science, |
| Year of publication | [2012] |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 136 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductors |
| Topical Term | Compound semiconductors |
| Topical Term | Silicon-on-insulator technology. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10570978 |
No items available.