Lithography (Record no. 163541)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01763nam a2200337 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/31 |
| 245 00 - TITLE STATEMENT | |
| Title | Lithography |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | London : |
| Name of publisher | ISTE ; |
| Place of publication | Hoboken, N.J. : |
| Name of publisher | Wiley, |
| Year of publication | 2011. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxv, 377 p. : |
| Other physical details | ill. (some col.) |
| 500 ## - GENERAL NOTE | |
| General note | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microlithography. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Landis, Stefan. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10671590 |
| 520 ## - SUMMARY, ETC. | |
| -- | Provided by publisher. |
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