Lithography [electronic resource] : main techniques / edited by Stefan Landis.

Contributor(s):

Material type:

TextPublication details: London : ISTE ; Hoboken, N.J. : Wiley, 2011.Description: xxv, 377 p. : ill. (some col.)Subject(s):

Microlithography

Genre/Form:

Electronic books.

DDC classification:

621.3815/31 22

LOC classification:

TK7872.M3 L58 2011eb

Online resources:

An electronic book accessible through the World Wide Web; click to view

Summary: "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

No physical items for this record

Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.

Includes bibliographical references and index.

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

There are no comments on this title.

to post a comment.