Silicon technologies (Record no. 67883)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01530nam a2200349 a 4500 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/2 |
| 245 00 - TITLE STATEMENT | |
| Title | Silicon technologies |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | London : |
| Name of publisher | ISTE ; |
| Place of publication | Hoboken, N.J. : |
| Name of publisher | Wiley, |
| Year of publication | 2011. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xvii, 337 p. : |
| Other physical details | ill. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductor doping. |
| Topical Term | Ion implantation. |
| Topical Term | Semiconductors |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Baudrant, Annie. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10660607 |
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