Enabling technologies for MEMS and nanodevices
Enabling technologies for MEMS and nanodevices advanced micro and nanosystems / [electronic resource] :
edited by Henry Baltes ... [et al.].
- Weinheim [Germany] : Wiley, 2013.
- xii, 427 p. : ill.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectronics.
Nanotechnology.
Microelectromechanical systems.
Electronic books.
TK7874 / .E53 2013eb
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectronics.
Nanotechnology.
Microelectromechanical systems.
Electronic books.
TK7874 / .E53 2013eb