Enabling technologies for MEMS and nanodevices (Record no. 32495)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01209nam a2200301 a 4500 |
| 245 00 - TITLE STATEMENT | |
| Title | Enabling technologies for MEMS and nanodevices |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Weinheim [Germany] : |
| Name of publisher | Wiley, |
| Year of publication | 2013. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xii, 427 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectronics. |
| Topical Term | Nanotechnology. |
| Topical Term | Microelectromechanical systems. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Baltes, Henry. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/rucke/Doc?id=10683273 |
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