Enabling technologies for MEMS and nanodevices [electronic resource] : advanced micro and nanosystems / edited by Henry Baltes ... [et al.].
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TextPublication details: Weinheim [Germany] : Wiley, 2013.Description: xii, 427 p. : illSubject(s): Genre/Form: LOC classification: - TK7874 .E53 2013eb
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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